AZMI, M. A. bin. Applications of Atomic Layer Deposition in Automation: A Review. International Journal of Intelligent Automation and Computing, [S. l.], v. 2, n. 1, p. 13–31, 2019. Disponível em: https://research.tensorgate.org/index.php/IJIAC/article/view/29. Acesso em: 21 nov. 2024.